Assignee
SMITH DANIEL GENE
US·3 granted patents·4 pending applications·1 citations·filing 2009–2012
Top patents by PatentIndex Score
7 records- 0160US8736813B2Exposure apparatus with an illumination system generating multiple illumination beamsSMITH DANIEL GENE·Filed 2009·Granted May 27, 2014·1 cites·20 claims
- 0250US2012212722A1Fast Illumination Simulator Based on a Calibrated Flexible Point Spread FunctionSMITH DANIEL GENE·Filed 2012·Application pending·0 cites
- 0347US2012008150A1Autofocus system and methodSMITH DANIEL GENE·Filed 2011·Application pending·0 cites
- 0443US8820948B2Compound parabolic collectors for projection lens metrologySMITH DANIEL GENE·Filed 2011·Granted Sep 2, 2014·0 cites·20 claims
- 0540US2012236397A1Two Mirror Optical SystemSMITH DANIEL GENE·Filed 2012·Application pending·0 cites
- 0639US8422027B2Imaging optical system for producing control information regarding lateral movement of an image plane or an object planeSMITH DANIEL GENE·Filed 2010·Granted Apr 16, 2013·0 cites·17 claims
- 0736US2012274913A1Enhanced contrast pin mirror for lithography toolsSMITH DANIEL GENE·Filed 2011·Application pending·0 cites
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