Assignee
SOMEYA HIROSHI
JP·4 granted patents·6 citations·filing 2007–2011
Top patents by PatentIndex Score
4 records- 0173US8445877B2Extreme ultraviolet light source apparatus and target supply deviceSOMEYA HIROSHI·Filed 2011·Granted May 21, 2013·3 cites·22 claims
- 0268US9046651B2Mirror deviceSOMEYA HIROSHI·Filed 2011·Granted Jun 2, 2015·2 cites·17 claims
- 0344US8258492B2Differential evacuation systemSOMEYA HIROSHI·Filed 2009·Granted Sep 4, 2012·1 cites·15 claims
- 0440US8477412B2Collector mirror exchanging apparatus and method for extreme ultraviolet light source apparatusSOMEYA HIROSHI·Filed 2007·Granted Jul 2, 2013·0 cites·2 claims
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