Assignee
SPACE ASSOCIATES INC K
US·3 granted patents·27 citations·filing 2004–2012
Top patents by PatentIndex Score
3 records- 0181US7837383B2Apparatus and method for real time measurement of substrate temperatures for use in semiconductor growth and wafer processingSPACE ASSOCIATES INC K·Filed 2008·Granted Nov 23, 2010·10 cites·7 claims
- 0269US7391523B1Curvature/tilt metrology tool with closed loop feedback controlSPACE ASSOCIATES INC K·Filed 2004·Granted Jun 24, 2008·17 cites·16 claims
- 0340US9030652B2Non-contact, optical sensor for synchronizing to free rotating sample platens with asymmetrySPACE ASSOCIATES INC K·Filed 2012·Granted May 12, 2015·0 cites·11 claims
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