Assignee
SPC ELECTRONICS
JP·2 granted patents·27 citations·filing 1998–2001
Top patents by PatentIndex Score
2 records- 0150US6616774B2Wafer cleaning device and tray for use in wafer cleaning deviceSPC ELECTRONICS·Filed 2001·Granted Sep 9, 2003·7 cites·5 claims
- 0249US6129100AWafer cleaning apparatus and structure for holding and transferring wafer used in wafer cleaning apparatusSPC ELECTRONICS·Filed 1998·Granted Oct 10, 2000·20 cites·21 claims
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