Assignee
SPECTRUM CVD INC
US·10 granted patents·300 citations·filing 1985–1990
Top patents by PatentIndex Score
10 records- 0184US4640224ACVD heat sourceSPECTRUM CVD INC·Filed 1985·Granted Feb 3, 1987·57 cites·4 claims
- 0283US4632057ACVD plasma reactorSPECTRUM CVD INC·Filed 1985·Granted Dec 30, 1986·52 cites·13 claims
- 0373US4692343APlasma enhanced CVDSPECTRUM CVD INC·Filed 1986·Granted Sep 8, 1987·30 cites·6 claims
- 0472US4737474ASilicide to silicon bonding processSPECTRUM CVD INC·Filed 1986·Granted Apr 12, 1988·28 cites·8 claims
- 0569US4607591ACVD heater control circuitSPECTRUM CVD INC·Filed 1985·Granted Aug 26, 1986·29 cites·5 claims
- 0667US4777061ABlanket tungsten deposition for dielectricSPECTRUM CVD INC·Filed 1987·Granted Oct 11, 1988·24 cites·4 claims
- 0760US4861563AVacuum load lockSPECTRUM CVD INC·Filed 1987·Granted Aug 29, 1989·29 cites·5 claims
- 0854US4966869ATungsten disilicide CVDSPECTRUM CVD INC·Filed 1990·Granted Oct 30, 1990·28 cites·4 claims
- 0945US4788416ADirect wafer temperature controlSPECTRUM CVD INC·Filed 1987·Granted Nov 29, 1988·11 cites·8 claims
- 1044US4749597AProcess for CVD of tungstenSPECTRUM CVD INC·Filed 1987·Granted Jun 7, 1988·12 cites·8 claims
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