Assignee
SPEEDFAM CLEAN SYSTEM CO LTD
JP·11 granted patents·155 citations·filing 1996–2000
Top patents by PatentIndex Score
11 records- 0169US6618889B1Disk-shaped workpiece washing apparatusSPEEDFAM CLEAN SYSTEM CO LTD·Filed 2000·Granted Sep 16, 2003·14 cites·11 claims
- 0262US6052855ALiquid flow workpiece cassette washing apparatusSPEEDFAM CLEAN SYSTEM CO LTD·Filed 1998·Granted Apr 25, 2000·19 cites·10 claims
- 0361US5709235ARunning water type washing machineSPEEDFAM CLEAN SYSTEM CO LTD·Filed 1996·Granted Jan 20, 1998·20 cites·14 claims
- 0457US5893381AMethod for scrubbing work in running wash liquidSPEEDFAM CLEAN SYSTEM CO LTD·Filed 1996·Granted Apr 13, 1999·20 cites·3 claims
- 0552US5890251AMethod and apparatus for scrubbing work in running wash liquidSPEEDFAM CLEAN SYSTEM CO LTD·Filed 1997·Granted Apr 6, 1999·16 cites·6 claims
- 0651US5727582AWork carrier assemblySPEEDFAM CLEAN SYSTEM CO LTD·Filed 1997·Granted Mar 17, 1998·12 cites·5 claims
- 0746US6058950APressurized liquid-supply and straightening mechanism in a water-flow washing apparatusSPEEDFAM CLEAN SYSTEM CO LTD·Filed 1998·Granted May 9, 2000·13 cites·6 claims
- 0846US5836325ARunning water type washing machineSPEEDFAM CLEAN SYSTEM CO LTD·Filed 1996·Granted Nov 17, 1998·15 cites·5 claims
- 0940US6163916ACleaning apparatus for disk-shaped workpiecesSPEEDFAM CLEAN SYSTEM CO LTD·Filed 1999·Granted Dec 26, 2000·7 cites·9 claims
- 1035US5775350ARunning water type washing machineSPEEDFAM CLEAN SYSTEM CO LTD·Filed 1996·Granted Jul 7, 1998·6 cites·6 claims
- 1133US6112355AOverflow scrub-washing method and apparatusSPEEDFAM CLEAN SYSTEM CO LTD·Filed 1998·Granted Sep 5, 2000·13 cites·11 claims
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