Assignee
SPRINGFIELD TECH & INTELLIGENCE INC
TW·2 granted patents·1 pending application·4 citations·filing 2018–2022
Top patents by PatentIndex Score
3 records- 0181US10998212B2Load port assembly with gas curtain device, and purging method for substrate storage podSPRINGFIELD TECH & INTELLIGENCE INC·Filed 2019·Granted May 4, 2021·4 cites·20 claims
- 0250US12281816B2Gas curtain device for load portSPRINGFIELD TECH & INTELLIGENCE INC·Filed 2022·Granted Apr 22, 2025·0 cites·12 claims
- 0335US2019035660A1Purging device and method for purging a delivering container on a load portSPRINGFIELD TECH & INTELLIGENCE INC·Filed 2018·Application pending·0 cites
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