Assignee
STAALS FRANK
NL·6 granted patents·26 citations·filing 2007–2010
Top patents by PatentIndex Score
6 records- 0186US8947632B2Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrateSTAALS FRANK·Filed 2010·Granted Feb 3, 2015·5 cites·12 claims
- 0284US8554510B2Method of measuring properties of dynamic positioning errors in a lithographic apparatus, data processing apparatus, and computer program productSTAALS FRANK·Filed 2010·Granted Oct 8, 2013·5 cites·14 claims
- 0380US8208122B2Method of measuring a lithographic projection apparatusSTAALS FRANK·Filed 2009·Granted Jun 26, 2012·7 cites·26 claims
- 0479US8582082B2Method and lithographic apparatus for measuring and acquiring height data relating to a substrate surfaceSTAALS FRANK·Filed 2009·Granted Nov 12, 2013·8 cites·19 claims
- 0564US8975599B2Image sensor, lithographic apparatus comprising an image sensor and use of an image sensor in a lithographic apparatusSTAALS FRANK·Filed 2007·Granted Mar 10, 2015·1 cites·29 claims
- 0654US9329500B2Lithographic apparatus configured to reconstruct an aerial pattern and to compare the reconstructed aerial pattern with an aerial pattern detected by an image sensorSTAALS FRANK·Filed 2008·Granted May 3, 2016·0 cites·11 claims
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