Assignee
STEAG C V D SYSTEMS LTD
IL·2 granted patents·50 citations·filing 1998–1999
Top patents by PatentIndex Score
2 records- 0161US6127658AWafer heating apparatus and method with radiation absorptive peripheral barrier blocking stray radiationSTEAG C V D SYSTEMS LTD·Filed 1998·Granted Oct 3, 2000·38 cites·18 claims
- 0244US6395192B1Method and apparatus for removing native oxide layers from silicon wafersSTEAG C V D SYSTEMS LTD·Filed 1999·Granted May 28, 2002·12 cites·10 claims
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