Assignee

STEAG CVD SYSTEMS LTD

US·1 granted patent·1 pending application·11 citations·filing 1999–2002

Technology mixH10P2 B08B1

Top patents by PatentIndex Score

2 records

0133US6313443B1Apparatus for processing material at controlled temperaturesSTEAG CVD SYSTEMS LTD·Filed 1999·Granted Nov 6, 2001·11 cites·14 claims
0232US2002108930A1Apparatus for removing native oxide layers from silicon wafersSTEAG CVD SYSTEMS LTD·Filed 2002·Application pending·0 cites

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