Assignee
STEAG HAMA TECH AG
US·3 granted patents·1 pending application·21 citations·filing 1999–2003
Top patents by PatentIndex Score
4 records- 0155US6858088B1Method and apparatus for treating substratesSTEAG HAMA TECH AG·Filed 2000·Granted Feb 22, 2005·7 cites·25 claims
- 0235US2006015883A1Method and device for removing and inserting a disk from and into a stack of disks from belowSTEAG HAMA TECH AG·Filed 2003·Application pending·0 cites
- 0332US6744521B1Method for determining the thickness of a multi-thin-layer structureSTEAG HAMA TECH AG·Filed 1999·Granted Jun 1, 2004·10 cites·9 claims
- 0432US6736590B1Lifting device for substratesSTEAG HAMA TECH AG·Filed 2000·Granted May 18, 2004·4 cites·10 claims
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