Assignee
STEAG RTP SYSTEMS
DE·4 granted patents·287 citations·filing 1997–1997
Top patents by PatentIndex Score
4 records- 0189US6222990B1Heating element for heating the edges of wafers in thermal processing chambersSTEAG RTP SYSTEMS·Filed 1997·Granted Apr 24, 2001·116 cites·24 claims
- 0286US6005226ARapid thermal processing (RTP) system with gas driven rotating substrateSTEAG RTP SYSTEMS·Filed 1997·Granted Dec 21, 1999·121 cites·26 claims
- 0359US6051512AApparatus and method for rapid thermal processing (RTP) of a plurality of semiconductor wafersSTEAG RTP SYSTEMS·Filed 1997·Granted Apr 18, 2000·33 cites·14 claims
- 0457US6100149AMethod for rapid thermal processing (RTP) of silicon substratesSTEAG RTP SYSTEMS·Filed 1997·Granted Aug 8, 2000·17 cites·17 claims
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