Assignee
STEAG RTP SYSTEMS GMBH
DE·11 granted patents·184 citations·filing 1998–2002
Top patents by PatentIndex Score
11 records- 0184US6614005B1Device and method for thermally treating substratesSTEAG RTP SYSTEMS GMBH·Filed 2000·Granted Sep 2, 2003·36 cites·39 claims
- 0274US6953338B2Device for thermal treatment of substratesSTEAG RTP SYSTEMS GMBH·Filed 2001·Granted Oct 11, 2005·23 cites·23 claims
- 0369US6737367B1UV-supported thermal treatment of compound semiconductors in RTP systemsSTEAG RTP SYSTEMS GMBH·Filed 2000·Granted May 18, 2004·21 cites·19 claims
- 0468US7004716B2Device and method for aligning disk-shaped substratesSTEAG RTP SYSTEMS GMBH·Filed 2000·Granted Feb 28, 2006·16 cites·35 claims
- 0567US6847012B1Apparatus and method for measuring the temperature of substratesSTEAG RTP SYSTEMS GMBH·Filed 2000·Granted Jan 25, 2005·10 cites·11 claims
- 0663US6561694B1Method and device for calibrating measurements of temperatures independent of emissivitySTEAG RTP SYSTEMS GMBH·Filed 1999·Granted May 13, 2003·30 cites·29 claims
- 0761US6830631B2Method for the removing of adsorbed molecules from a chamberSTEAG RTP SYSTEMS GMBH·Filed 2002·Granted Dec 14, 2004·8 cites·18 claims
- 0851US7041610B1Method and apparatus for the thermal treatment of substratesSTEAG RTP SYSTEMS GMBH·Filed 2000·Granted May 9, 2006·5 cites·20 claims
- 0945US6316747B1Apparatus for the thermal treatment of substratesSTEAG RTP SYSTEMS GMBH·Filed 1999·Granted Nov 13, 2001·12 cites·11 claims
- 1042US6752625B1Method and apparatus device for the heat treatment of substratesSTEAG RTP SYSTEMS GMBH·Filed 1999·Granted Jun 22, 2004·11 cites·12 claims
- 1137US6077751AMethod of rapid thermal processing (RTP) of ion implanted siliconSTEAG RTP SYSTEMS GMBH·Filed 1998·Granted Jun 20, 2000·12 cites·14 claims
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