Assignee
STEENBRINK STIJN WILLEM HERMAN KAREL
NL·4 granted patents·25 citations·filing 2006–2011
Top patents by PatentIndex Score
4 records- 0191US8198602B2Electrostatic lens structureSTEENBRINK STIJN WILLEM HERMAN KAREL·Filed 2011·Granted Jun 12, 2012·22 cites·23 claims
- 0270US8263942B2System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emissionSTEENBRINK STIJN WILLEM HERMAN KAREL·Filed 2011·Granted Sep 11, 2012·1 cites·17 claims
- 0368US8890095B2Reliability in a maskless lithography systemSTEENBRINK STIJN WILLEM HERMAN KAREL·Filed 2006·Granted Nov 18, 2014·2 cites·18 claims
- 0452US8247958B2System, method and apparatus for multi-beam lithography including a dispenser cathode for homogeneous electron emissionSTEENBRINK STIJN WILLEM HERMAN KAREL·Filed 2010·Granted Aug 21, 2012·0 cites·11 claims
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