Assignee
STEIJAERT PETER PAUL
NL·3 granted patents·3 citations·filing 2007–2011
Technology mixG03F3
Top patents by PatentIndex Score
3 records- 0169US8687166B2Lithographic apparatus having an encoder position sensor systemSTEIJAERT PETER PAUL·Filed 2007·Granted Apr 1, 2014·3 cites·20 claims
- 0252US8836913B2Lithographic apparatus having an encoder type position sensor systemSTEIJAERT PETER PAUL·Filed 2011·Granted Sep 16, 2014·0 cites·15 claims
- 0351US8760615B2Lithographic apparatus having encoder type position sensor systemSTEIJAERT PETER PAUL·Filed 2008·Granted Jun 24, 2014·0 cites·20 claims
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