Assignee
STEINHOFF JENS ARNO
DE·2 granted patents·6 citations·filing 2010–2011
Top patents by PatentIndex Score
2 records- 0176US9298110B2Radiation source apparatus, lithographic apparatus, method of generating and delivering radiation and method for manufacturing a deviceSTEINHOFF JENS ARNO·Filed 2011·Granted Mar 29, 2016·6 cites·19 claims
- 0226US8487279B2Gas contamination sensor, lithographic apparatus, method of determining a level of contaminant gas and device manufacturing methodSTEINHOFF JENS ARNO·Filed 2010·Granted Jul 16, 2013·0 cites·14 claims
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