Assignee
STOKOWSKI STANLEY E
US·1 granted patent·2 pending applications·34 citations·filing 2005–2010
Top patents by PatentIndex Score
3 records- 0195US8711346B2Inspection systems and methods for detecting defects on extreme ultraviolet mask blanksSTOKOWSKI STANLEY E·Filed 2010·Granted Apr 29, 2014·34 cites·37 claims
- 0252US2008218747A1Method and Apparatus for Detecting Surface Characteristics on a Mask BlankSTOKOWSKI STANLEY E·Filed 2008·Application pending·0 cites
- 0346US2005254065A1Method and apparatus for detecting surface characteristics on a mask blankSTOKOWSKI STANLEY E·Filed 2005·Application pending·0 cites
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