Assignee
SUMIDA SHINICHI
JP·1 granted patent·1 pending application·2 citations·filing 2005–2011
Top patents by PatentIndex Score
2 records- 0174US8691491B2Fluorine-containing compounds and their polymers useful for anti-reflection film materials and resist compositionsSUMIDA SHINICHI·Filed 2011·Granted Apr 8, 2014·2 cites·5 claims
- 0234US2006194143A1Fluorine-containing polymerizable monomers, fluorine-containing polymer compounds, resist compositions using the same, and patterning processSUMIDA SHINICHI·Filed 2005·Application pending·0 cites
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