Assignee
SUMITOMO HEAVY IND ION TECH CO LTD
JP·14 granted patents·30 citations·filing 2013–2016
Top patents by PatentIndex Score
14 records- 0188US9466467B2Ion implantation apparatusSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2013·Granted Oct 11, 2016·8 cites·11 claims
- 0286US9502210B2Ion implanter, ion implantation method, and beam measurement apparatusSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2015·Granted Nov 22, 2016·5 cites·24 claims
- 0382US9412561B2Ion implantation method and ion implantation apparatusSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2015·Granted Aug 9, 2016·4 cites·19 claims
- 0479US9449791B2Beam irradiation apparatus and beam irradiation methodSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2015·Granted Sep 20, 2016·4 cites·22 claims
- 0578US9564292B2Ion beam measuring device and method of measuring ion beamSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2014·Granted Feb 7, 2017·4 cites·19 claims
- 0676US9659749B2Beam extraction slit structure and ion sourceSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2015·Granted May 23, 2017·2 cites·11 claims
- 0769US9576771B2High energy ion implanter, beam current adjuster, and beam current adjustment methodSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2016·Granted Feb 21, 2017·1 cites·14 claims
- 0865US9431214B2Ion implantation apparatusSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2015·Granted Aug 30, 2016·1 cites·16 claims
- 0961US9502759B2Antenna cover and plasma generating device using sameSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2014·Granted Nov 22, 2016·1 cites·12 claims
- 1048US9659755B2Plasma generator and thermal electron emitterSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2016·Granted May 23, 2017·0 cites·15 claims
- 1147US9425023B2Ion generator and thermal electron emitterSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2015·Granted Aug 23, 2016·0 cites·16 claims
- 1246US9520265B2Ion implantation apparatusSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2014·Granted Dec 13, 2016·0 cites·15 claims
- 1331US9564289B2Ion implanter and method of controlling the sameSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2015·Granted Feb 7, 2017·0 cites·18 claims
- 1430US9666413B2Ion implantation apparatus and control method for ion implantation apparatusSUMITOMO HEAVY IND ION TECH CO LTD·Filed 2015·Granted May 30, 2017·0 cites·18 claims
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