Assignee
SUMITOMO HEAVY IND ION TECHNOLOGY CO LTD
JP·15 granted patents·58 citations·filing 2013–2015
Top patents by PatentIndex Score
15 records- 0193US9293295B2Ion implantation apparatus, final energy filter, and ion implantation methodSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2015·Granted Mar 22, 2016·16 cites·23 claims
- 0290US9343263B2Ion implanter, beam energy measuring device, and method of measuring beam energySUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2015·Granted May 17, 2016·7 cites·21 claims
- 0390US9269541B2High energy ion implanter, beam current adjuster, and beam current adjustment methodSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2014·Granted Feb 23, 2016·11 cites·14 claims
- 0489US9390889B2Ion implanter and method of ion beam tuningSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2015·Granted Jul 12, 2016·7 cites·24 claims
- 0583US9336992B2Ion implantation apparatusSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2015·Granted May 10, 2016·4 cites·22 claims
- 0677US9236222B2Ion implantation apparatus and ion implantation methodSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2015·Granted Jan 12, 2016·2 cites·8 claims
- 0776US9368327B2High-energy ion implanterSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2014·Granted Jun 14, 2016·3 cites·16 claims
- 0870US9390890B2High-energy ion implanterSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2014·Granted Jul 12, 2016·3 cites·19 claims
- 0969US9355847B2High-energy ion implanterSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2014·Granted May 31, 2016·2 cites·16 claims
- 1065US9373481B2High-energy ion implanter, beam collimator, and beam collimation methodSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2015·Granted Jun 21, 2016·2 cites·25 claims
- 1160US9379030B2Ion implantation method and ion implantation apparatusSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2013·Granted Jun 28, 2016·1 cites·20 claims
- 1255US9318298B2Ion generator and ion generating methodSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2014·Granted Apr 19, 2016·0 cites·13 claims
- 1351US9343262B2Ion implantation apparatus, beam parallelizing apparatus, and ion implantation methodSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2014·Granted May 17, 2016·0 cites·14 claims
- 1439US9384944B2Ion implanter and ion implantation methodSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2015·Granted Jul 5, 2016·0 cites·16 claims
- 1539US9208991B1Ion implantation apparatusSUMITOMO HEAVY IND ION TECHNOLOGY CO LTD·Filed 2015·Granted Dec 8, 2015·0 cites·17 claims
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