Assignee
SUMITOMO HEAVY INDUSTRIES ION TECH CO LTD
JP·47 granted patents·16 pending applications·58 citations·filing 2014–2025
Top patents by PatentIndex Score
63 records- 0194US11728132B2Ion implanter and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2022·Granted Aug 15, 2023·2 cites·19 claims
- 0293US11527381B2Ion implanter and model generation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2021·Granted Dec 13, 2022·2 cites·11 claims
- 0392US10283422B2Ion implantation method and ion implantation apparatusSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2017·Granted May 7, 2019·11 cites·18 claims
- 0491US11978608B2Ion generation device and ion generation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2021·Granted May 7, 2024·2 cites·15 claims
- 0590US10354835B2Ion implanter, ion beam irradiated target, and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2018·Granted Jul 16, 2019·5 cites·14 claims
- 0689US11848170B2Ion generator and ion implanterSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2022·Granted Dec 19, 2023·2 cites·14 claims
- 0789US11569058B2Ion implanter and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2020·Granted Jan 31, 2023·2 cites·21 claims
- 0887US11380512B2Ion generator and ion implanterSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2020·Granted Jul 5, 2022·3 cites·18 claims
- 0986US11107659B2Ion generator and ion implanterSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2020·Granted Aug 31, 2021·2 cites·18 claims
- 1085US11205560B2Ion implanter and beam profilerSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2020·Granted Dec 21, 2021·3 cites·18 claims
- 1181US10361066B2Ion implantation apparatusSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2018·Granted Jul 23, 2019·1 cites·12 claims
- 1281US10217607B2Ion implantation apparatus and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2017·Granted Feb 26, 2019·3 cites·19 claims
- 1380US12243708B2Ion generator and ion implanterSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2023·Granted Mar 4, 2025·0 cites·14 claims
- 1480US10497546B2Insulating structureSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2018·Granted Dec 3, 2019·2 cites·16 claims
- 1580US10490389B2Ion implanter and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2018·Granted Nov 26, 2019·4 cites·16 claims
- 1679US11923167B2Ion implanter and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2022·Granted Mar 5, 2024·0 cites·11 claims
- 1778US11823863B2Ion implanter and model generation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2022·Granted Nov 21, 2023·0 cites·13 claims
- 1876US10121666B2Ion implantation method and ion implantation apparatusSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2016·Granted Nov 6, 2018·3 cites·16 claims
- 1976US2026058087A1Ion implantation method and solid source material used for ion generationSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2025·Application pending·0 cites
- 2075US10896843B2Wafer holding device and wafer chucking and dechucking methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2018·Granted Jan 19, 2021·2 cites·18 claims
- 2175US9905397B2Ion implantation apparatus and scanning waveform preparation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2017·Granted Feb 27, 2018·2 cites·20 claims
- 2272US9984856B2Ion implantation apparatusSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2016·Granted May 29, 2018·2 cites·17 claims
- 2372US2025174424A1Ion generator and ion implanterSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2025·Application pending·0 cites
- 2471US2025323015A1Ion implanter and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2025·Application pending·0 cites
- 2570US12255046B2Ion implantation method and ion implanterSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2023·Granted Mar 18, 2025·0 cites·20 claims
- 2670US10672586B2Ion implantation apparatus and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2019·Granted Jun 2, 2020·2 cites·22 claims
- 2770US9984851B2Ion implanter, magnetic field measurement device, and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2014·Granted May 29, 2018·2 cites·12 claims
- 2869US10283326B2Ion generator and method of controlling ion generatorSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2016·Granted May 7, 2019·1 cites·12 claims
- 2963US2025014862A1Method for monitoring neutron ray and ion implanterSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2024·Application pending·0 cites
- 3063US2025014860A1Ion implantation method and ion implanterSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2024·Application pending·0 cites
- 3161US2025308966A1Wafer processing device, wafer processing method, and ion implanterSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2025·Application pending·0 cites
- 3261US2024420935A1Substrate processing apparatus, substrate processing method, and method for manufacturing semiconductor deviceSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2024·Application pending·0 cites
- 3359US11062880B2Ion implanterSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2020·Granted Jul 13, 2021·0 cites·23 claims
- 3458US11699569B2Ion implanter and particle detection methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2021·Granted Jul 11, 2023·0 cites·20 claims
- 3557US12221689B2Insulating structure, method for manufacturing insulating structure, ion generation device, and ion implanterSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2021·Granted Feb 11, 2025·0 cites·11 claims
- 3657US2023260747A1Ion implanter and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2023·Application pending·0 cites
- 3757US2024404785A1Ion implanter and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2024·Application pending·0 cites
- 3856US12469677B2Ion implantation method, ion implanter, and method for manufacturing semiconductor deviceSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2022·Granted Nov 11, 2025·0 cites·24 claims
- 3955US11017978B2Ion implanter and beam park deviceSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2019·Granted May 25, 2021·0 cites·20 claims
- 4055US10361058B2Ion generatorSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2018·Granted Jul 23, 2019·0 cites·18 claims
- 4155US2025279257A1Ion implanter and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2025·Application pending·0 cites
- 4254US11830703B2Ion implantation method and ion implanterSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2019·Granted Nov 28, 2023·0 cites·23 claims
- 4354US2022285126A1Ion implanter and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2022·Application pending·0 cites
- 4454US2024266140A1Ion generation device and ion implanterSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2024·Application pending·0 cites
- 4553US11581163B2Ion implanter and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2020·Granted Feb 14, 2023·0 cites·20 claims
- 4652US2023260741A1Ion implanter and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2023·Application pending·0 cites
- 4750US11603590B2Ion implanter irradiating ion mean onto wafer and ion implantation method using the sameSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2020·Granted Mar 14, 2023·0 cites·17 claims
- 4850US11145488B2Ion implanter and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2020·Granted Oct 12, 2021·0 cites·17 claims
- 4948US12094685B2Ion implanter and ion implantation methodSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2022·Granted Sep 17, 2024·0 cites·22 claims
- 5048US11710618B2Ion implanter and electrostatic quadrupole lens deviceSUMITOMO HEAVY INDUSTRIES ION TECH CO LTD·Filed 2022·Granted Jul 25, 2023·0 cites·20 claims
Showing the top 50 of 63 patent records by PatentIndex Score.
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