Assignee
SUN JENNIFER
US·1 granted patent·1 pending application·33 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0193US8916021B2Electrostatic chuck and showerhead with enhanced thermal properties and methods of making thereofSUN JENNIFER·Filed 2011·Granted Dec 23, 2014·33 cites·18 claims
- 0237US2011198034A1Gas distribution showerhead with coating material for semiconductor processingSUN JENNIFER·Filed 2011·Application pending·0 cites
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