Individual holder
SUN JENNIFER Y
US·10 granted patents·4 pending applications·322 citations·filing 2004–2012
Individually held — no corporate assignee on record.
Top patents by PatentIndex Score
14 records- 0198US8206829B2Plasma resistant coatings for plasma chamber componentsSUN JENNIFER Y·Filed 2008·Granted Jun 26, 2012·83 cites·24 claims
- 0297US8858745B2Corrosion-resistant bonding agents for bonding ceramic components which are exposed to plasmasSUN JENNIFER Y·Filed 2008·Granted Oct 14, 2014·50 cites·6 claims
- 0397US8758858B2Method of producing a plasma-resistant thermal oxide coatingSUN JENNIFER Y·Filed 2012·Granted Jun 24, 2014·38 cites·9 claims
- 0497US8623527B2Semiconductor processing apparatus comprising a coating formed from a solid solution of yttrium oxide and zirconium oxideSUN JENNIFER Y·Filed 2011·Granted Jan 7, 2014·27 cites·7 claims
- 0597US8129029B2Erosion-resistant plasma chamber components comprising a metal base structure with an overlying thermal oxidation coatingSUN JENNIFER Y·Filed 2007·Granted Mar 6, 2012·39 cites·10 claims
- 0696US9017765B2Protective coatings resistant to reactive plasma processingSUN JENNIFER Y·Filed 2009·Granted Apr 28, 2015·33 cites·9 claims
- 0796US8871312B2Method of reducing plasma arcing on surfaces of semiconductor processing apparatus components in a plasma processing chamberSUN JENNIFER Y·Filed 2012·Granted Oct 28, 2014·21 cites·5 claims
- 0885US8067067B2Clean, dense yttrium oxide coating protecting semiconductor processing apparatusSUN JENNIFER Y·Filed 2004·Granted Nov 29, 2011·26 cites·9 claims
- 0978US9520314B2High temperature electrostatic chuck bonding adhesiveSUN JENNIFER Y·Filed 2009·Granted Dec 13, 2016·4 cites·23 claims
- 1067US2009087615A1Corrosion-resistant gas distribution plate for plasma processing chamberSUN JENNIFER Y·Filed 2008·Application pending·0 cites
- 1162US8231736B2Wet clean process for recovery of anodized chamber partsSUN JENNIFER Y·Filed 2007·Granted Jul 31, 2012·1 cites·16 claims
- 1258US2010140222A1Filled polymer composition for etch chamber componentSUN JENNIFER Y·Filed 2009·Application pending·0 cites
- 1339US2008029032A1Substrate support with protective layer for plasma resistanceSUN JENNIFER Y·Filed 2006·Application pending·0 cites
- 1439US2013344285A1Adhesive material used for joining chamber componentsSUN JENNIFER Y·Filed 2011·Application pending·0 cites
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Counts cover granted patents and pending applications in the PatentIndex corpus. How scoring works →