Assignee
SUN MEI
US·3 granted patents·14 citations·filing 2010–2013
Top patents by PatentIndex Score
3 records- 0186US9222842B2High temperature sensor wafer for in-situ measurements in active plasmaSUN MEI·Filed 2013·Granted Dec 29, 2015·9 cites·57 claims
- 0266US9134186B2Process condition measuring device (PCMD) and method for measuring process conditions in a workpiece processing tool configured to process production workpiecesSUN MEI·Filed 2011·Granted Sep 15, 2015·2 cites·52 claims
- 0364US8604361B2Component package for maintaining safe operating temperature of componentsSUN MEI·Filed 2010·Granted Dec 10, 2013·3 cites·28 claims
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