Assignee
SUN SAM X
US·3 granted patents·11 citations·filing 2007–2011
Top patents by PatentIndex Score
3 records- 0184US8415083B2On-track process for patterning hardmask by multiple dark field exposuresSUN SAM X·Filed 2011·Granted Apr 9, 2013·6 cites·11 claims
- 0270US8133659B2On-track process for patterning hardmask by multiple dark field exposuresSUN SAM X·Filed 2009·Granted Mar 13, 2012·3 cites·14 claims
- 0362US8168372B2Method of creating photolithographic structures with developer-trimmed hard maskSUN SAM X·Filed 2007·Granted May 1, 2012·2 cites·20 claims
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