Assignee
SUPER SILICON CRYSTAL RES INST
JP·24 granted patents·1,200 citations·filing 1997–2000
Top patents by PatentIndex Score
24 records- 0196US6578589B1Apparatus for manufacturing semiconductor waferSUPER SILICON CRYSTAL RES INST·Filed 2000·Granted Jun 17, 2003·516 cites·3 claims
- 0288US6237585B1Wire-sawing machineSUPER SILICON CRYSTAL RES INST·Filed 2000·Granted May 29, 2001·40 cites·4 claims
- 0385US5995226AOptical apparatus for measuring profiles of a waferSUPER SILICON CRYSTAL RES INST·Filed 1998·Granted Nov 30, 1999·115 cites·2 claims
- 0482US6422067B1Slurry useful for wire-saw slicing and evaluation of slurrySUPER SILICON CRYSTAL RES INST·Filed 2000·Granted Jul 23, 2002·23 cites·1 claims
- 0582US6004405AWafer having a laser mark on chamfered edgeSUPER SILICON CRYSTAL RES INST·Filed 1998·Granted Dec 21, 1999·69 cites·4 claims
- 0681US6245152B1Method and apparatus for producing epitaxial waferSUPER SILICON CRYSTAL RES INST·Filed 1997·Granted Jun 12, 2001·43 cites·11 claims
- 0779US5975997AMethod of double-side lapping a wafer and an apparatus thereforSUPER SILICON CRYSTAL RES INST·Filed 1997·Granted Nov 2, 1999·52 cites·2 claims
- 0878US6262393B1Epitaxial growth furnaceSUPER SILICON CRYSTAL RES INST·Filed 1998·Granted Jul 17, 2001·48 cites·7 claims
- 0975US6361597B1Single crystal material auxiliary melting apparatus and single crystal material melting methodSUPER SILICON CRYSTAL RES INST·Filed 1998·Granted Mar 26, 2002·35 cites·15 claims
- 1074US6065461AIngot slicing method and apparatus thereforSUPER SILICON CRYSTAL RES INST·Filed 1998·Granted May 23, 2000·35 cites·3 claims
- 1171US6504615B1Optical instrument for measuring shape of waferSUPER SILICON CRYSTAL RES INST·Filed 1999·Granted Jan 7, 2003·49 cites·2 claims
- 1270US6196901B1Method of double-side lapping a wafer and an apparatus thereforSUPER SILICON CRYSTAL RES INST·Filed 1999·Granted Mar 6, 2001·33 cites·3 claims
- 1368US6228167B1Single crystal pulling apparatusSUPER SILICON CRYSTAL RES INST·Filed 1998·Granted May 8, 2001·26 cites·41 claims
- 1465US5993292AProduction of notchless waferSUPER SILICON CRYSTAL RES INST·Filed 1998·Granted Nov 30, 1999·31 cites·2 claims
- 1563US6261166B1Wire cleaning apparatusSUPER SILICON CRYSTAL RES INST·Filed 2000·Granted Jul 17, 2001·12 cites·2 claims
- 1657US6117234ASingle crystal growing apparatus and single crystal growing methodSUPER SILICON CRYSTAL RES INST·Filed 1998·Granted Sep 12, 2000·13 cites·16 claims
- 1748US6022411ASingle crystal pulling apparatusSUPER SILICON CRYSTAL RES INST·Filed 1998·Granted Feb 8, 2000·11 cites·14 claims
- 1847US6165054ADouble side grinding apparatus and double side polishing apparatusSUPER SILICON CRYSTAL RES INST·Filed 1999·Granted Dec 26, 2000·15 cites·8 claims
- 1945US6217648B1Single crystal pull-up apparatus and single crystal pull-up methodSUPER SILICON CRYSTAL RES INST·Filed 1998·Granted Apr 17, 2001·11 cites·15 claims
- 2038US6372040B1Single crystal growth apparatus and single crystal growth methodSUPER SILICON CRYSTAL RES INST·Filed 1999·Granted Apr 16, 2002·4 cites·4 claims
- 2138US6255664B1Sensor for measuring degree of flatnessSUPER SILICON CRYSTAL RES INST·Filed 1999·Granted Jul 3, 2001·8 cites·6 claims
- 2237US6863735B1Epitaxial growth furnaceSUPER SILICON CRYSTAL RES INST·Filed 1999·Granted Mar 8, 2005·7 cites·4 claims
- 2333US6033472ASemiconductor single crystal manufacturing apparatusSUPER SILICON CRYSTAL RES INST·Filed 1998·Granted Mar 7, 2000·3 cites·9 claims
- 2431US6077348ASingle crystal pulling apparatus, single crystal support mechanism, and single crystal pulling methodSUPER SILICON CRYSTAL RES INST·Filed 1998·Granted Jun 20, 2000·1 cites·15 claims
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