Assignee
SURFACE TECHNOLOGY SYSTEMS PLC
GB·13 granted patents·1 pending application·375 citations·filing 1997–2007
Top patents by PatentIndex Score
14 records- 0189US6409876B1Apparatus for etching a workpieceSURFACE TECHNOLOGY SYSTEMS PLC·Filed 1998·Granted Jun 25, 2002·75 cites·8 claims
- 0281US6602433B1Gas delivery systemSURFACE TECHNOLOGY SYSTEMS PLC·Filed 2000·Granted Aug 5, 2003·31 cites·13 claims
- 0381US6458239B1Plasma processing apparatusSURFACE TECHNOLOGY SYSTEMS PLC·Filed 1997·Granted Oct 1, 2002·31 cites·17 claims
- 0478US7491649B2Plasma processing apparatusSURFACE TECHNOLOGY SYSTEMS PLC·Filed 2005·Granted Feb 17, 2009·6 cites·3 claims
- 0578US6602384B2Plasma processing apparatusSURFACE TECHNOLOGY SYSTEMS PLC·Filed 2001·Granted Aug 5, 2003·11 cites·6 claims
- 0677US6355181B1Method and apparatus for manufacturing a micromechanical deviceSURFACE TECHNOLOGY SYSTEMS PLC·Filed 1999·Granted Mar 12, 2002·68 cites·13 claims
- 0776US7141504B1Method and apparatus for anisotropic etchingSURFACE TECHNOLOGY SYSTEMS PLC·Filed 1999·Granted Nov 28, 2006·48 cites·26 claims
- 0876US6534922B2Plasma processing apparatusSURFACE TECHNOLOGY SYSTEMS PLC·Filed 2001·Granted Mar 18, 2003·31 cites·7 claims
- 0971US7306745B1Method and apparatus for stabilizing a plasmaSURFACE TECHNOLOGY SYSTEMS PLC·Filed 2000·Granted Dec 11, 2007·17 cites·35 claims
- 1070US6929784B1Chlorotrifuorine gas generator systemSURFACE TECHNOLOGY SYSTEMS PLC·Filed 2000·Granted Aug 16, 2005·15 cites·5 claims
- 1165US6933242B1Plasma etchingSURFACE TECHNOLOGY SYSTEMS PLC·Filed 2000·Granted Aug 23, 2005·14 cites·21 claims
- 1260US6628500B1Method and apparatus for dechucking a substrate from an electrostatic chuckSURFACE TECHNOLOGY SYSTEMS PLC·Filed 1999·Granted Sep 30, 2003·26 cites·9 claims
- 1350US6926871B1Gas generation systemSURFACE TECHNOLOGY SYSTEMS PLC·Filed 2000·Granted Aug 9, 2005·2 cites·9 claims
- 1447US2009139658A1Plasma processing apparatusSURFACE TECHNOLOGY SYSTEMS PLC·Filed 2007·Application pending·0 cites
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