Assignee
SURFCOAT OY
FI·2 granted patents·300 citations·filing 1994–1995
Top patents by PatentIndex Score
2 records- 0194US5716500AMethod and an apparatus for generation of a discharge in own vapors of a radio frequency electrode for sustained self-sputtering and evaporation of the electrodeSURFCOAT OY·Filed 1994·Granted Feb 10, 1998·255 cites·18 claims
- 0274US5908602AApparatus for generation of a linear arc discharge for plasma processingSURFCOAT OY·Filed 1995·Granted Jun 1, 1999·45 cites·20 claims
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