Assignee
SUSS MICROTEC INC
US·3 granted patents·2 pending applications·39 citations·filing 2003–2010
Top patents by PatentIndex Score
5 records- 0186US6829988B2Nanoimprinting apparatus and methodSUSS MICROTEC INC·Filed 2003·Granted Dec 14, 2004·35 cites·27 claims
- 0269US7612895B2Apparatus and method for in-situ monitoring of wafer bonding timeSUSS MICROTEC INC·Filed 2008·Granted Nov 3, 2009·4 cites·16 claims
- 0351US7975744B2High-throughput bond toolSUSS MICROTEC INC·Filed 2006·Granted Jul 12, 2011·0 cites·23 claims
- 0445US2010089978A1Method and apparatus for wafer bondingSUSS MICROTEC INC·Filed 2009·Application pending·0 cites
- 0530US2010264566A1Rapid fabrication of a microelectronic temporary support for inorganic substratesSUSS MICROTEC INC·Filed 2010·Application pending·0 cites
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