Assignee
SUSS MICROTEC LITHOGRAPHY GMBH
DE·46 granted patents·10 pending applications·122 citations·filing 2003–2024
Top patents by PatentIndex Score
56 records- 0192US8366873B2Debonding equipment and methods for debonding temporary bonded wafersSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2011·Granted Feb 5, 2013·14 cites·30 claims
- 0291US7948034B2Apparatus and method for semiconductor bondingSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2007·Granted May 24, 2011·27 cites·39 claims
- 0388US11499855B2Apparatus for measuring a fluid flow through a pipe of a semiconductor manufacturing deviceSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2019·Granted Nov 15, 2022·6 cites·19 claims
- 0488US8950459B2Debonding temporarily bonded semiconductor wafersSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2012·Granted Feb 10, 2015·10 cites·20 claims
- 0585US10688524B2Method for coating a substrate and coating deviceSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2015·Granted Jun 23, 2020·4 cites·18 claims
- 0685US9583374B2Debonding temporarily bonded semiconductor wafersSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2016·Granted Feb 28, 2017·4 cites·18 claims
- 0782US10259124B2Suction apparatus for an end effector, end effector for holding substrates and method of producing an end effectorSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2018·Granted Apr 16, 2019·5 cites·12 claims
- 0881US9472437B2Debonding temporarily bonded semiconductor wafersSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2014·Granted Oct 18, 2016·4 cites·6 claims
- 0979US9281229B2Method for thermal-slide debonding of temporary bonded semiconductor wafersSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2014·Granted Mar 8, 2016·3 cites·16 claims
- 1078US10825705B2Apparatus, system, and method for handling aligned wafer pairsSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2016·Granted Nov 3, 2020·2 cites·14 claims
- 1178US9837295B2Apparatus and method for semiconductor wafer leveling, force balancing and contact sensingSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2014·Granted Dec 5, 2017·3 cites·18 claims
- 1277US10343292B2End effectorSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2018·Granted Jul 9, 2019·3 cites·20 claims
- 1376US9875917B2Semiconductor bonding apparatus and related techniquesSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2017·Granted Jan 23, 2018·2 cites·29 claims
- 1475US11776827B2Adapter, connection device and supply systemSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2021·Granted Oct 3, 2023·1 cites·16 claims
- 1574US10103049B2Method and apparatus for preventing the deformation of a substrate supported at its edge areaSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2015·Granted Oct 16, 2018·3 cites·11 claims
- 1673US10825701B2Baking device for a wafer coated with a coating containing a solventSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2015·Granted Nov 3, 2020·2 cites·14 claims
- 1772US8343300B2Automated thermal slide debonderSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2010·Granted Jan 1, 2013·5 cites·24 claims
- 1871US2024312806A1Bonding device as well as method for bonding substratesSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2024·Application pending·0 cites
- 1970US9799554B2Method for coating a substrateSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2016·Granted Oct 24, 2017·2 cites·19 claims
- 2069US11651983B2Apparatus, system, and method for handling aligned wafer pairsSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2020·Granted May 16, 2023·0 cites·16 claims
- 2169US9859141B2Apparatus and method for aligning and centering wafersSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2014·Granted Jan 2, 2018·2 cites·7 claims
- 2267US11247229B2Method for coating a substrate with a lacquer and device for planarising a lacquer layerSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2019·Granted Feb 15, 2022·0 cites·6 claims
- 2367US10937681B2Wafer support system, wafer support device, system comprising a wafer and a wafer support device as well as mask alignerSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2018·Granted Mar 2, 2021·2 cites·20 claims
- 2467US9458002B2Bottle supply system and bottle cap adapterSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2015·Granted Oct 4, 2016·3 cites·17 claims
- 2560US7057707B2Method and device for adjusting an alignment microscope by means of a reflective alignment maskSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2004·Granted Jun 6, 2006·5 cites·8 claims
- 2657US11504825B2Holding apparatus and method for holding a substrateSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2021·Granted Nov 22, 2022·0 cites·5 claims
- 2757US10232405B2Method for coating a substrate with a lacquer and device for planarising a lacquer layerSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2015·Granted Mar 19, 2019·0 cites·11 claims
- 2856US12009230B2Bonding device as well as method for bonding substratesSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2019·Granted Jun 11, 2024·0 cites·29 claims
- 2955US10580678B2Apparatus and method for semiconductor wafer leveling, force balancing and contact sensingSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2017·Granted Mar 3, 2020·0 cites·3 claims
- 3054US9640418B2Apparatus, system, and method for handling aligned wafer pairsSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2016·Granted May 2, 2017·0 cites·20 claims
- 3153US10319615B2Semiconductor bonding apparatus and related techniquesSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2017·Granted Jun 11, 2019·0 cites·20 claims
- 3253US7950347B2Rotatable device for holding a substrateSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2005·Granted May 31, 2011·1 cites·18 claims
- 3352US2020341372A1Replication device and method for reproducing a structure on a substrateSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2020·Application pending·0 cites
- 3451US6966560B2Device for fixing thin and flexible substratesSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2003·Granted Nov 22, 2005·9 cites·17 claims
- 3549US11049746B2Substrate cassetteSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2019·Granted Jun 29, 2021·0 cites·21 claims
- 3647US11148258B2Holding apparatus and method for holding a substrateSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2019·Granted Oct 19, 2021·0 cites·12 claims
- 3746US10241415B2Light source arrangement for a photolithography exposure system and photolithography exposure systemSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2017·Granted Mar 26, 2019·0 cites·16 claims
- 3846US2020122302A1Fixation system, support plate and method for production thereofSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2019·Application pending·0 cites
- 3945US9864277B2Method for regulating a light source of a photolithography exposure system and exposure assembly for a photolithography deviceSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2016·Granted Jan 9, 2018·0 cites·19 claims
- 4044US11183401B2System and related techniques for handling aligned substrate pairsSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2017·Granted Nov 23, 2021·0 cites·15 claims
- 4144US2019388912A1Dispensing Nozzle for a CoaterSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2019·Application pending·0 cites
- 4243US10295063B2Wafer treating device and sealing ring for a wafer treating deviceSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2016·Granted May 21, 2019·0 cites·9 claims
- 4341US9824909B2Chuck, in particular for use in a mask alignerSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2013·Granted Nov 21, 2017·0 cites·16 claims
- 4440US2021402431A1Wet process module and method of operationSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2021·Application pending·0 cites
- 4539US10953415B2Nozzle tip adapter, nozzle assembly as well as nozzleSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2018·Granted Mar 23, 2021·0 cites·13 claims
- 4639US2016240414A1Chuck for Suction and Holding a WaferSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2013·Application pending·0 cites
- 4738US2020348588A1Framework for a replication device, replication device as well as method for producing nanostructured and/or microstructured components by means of a replication deviceSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2020·Application pending·0 cites
- 4837US10101672B2Device for treating a disc-shaped substrate and support adapterSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2016·Granted Oct 16, 2018·0 cites·21 claims
- 4937US2020096867A1Edge bead removal system and method of treating a substrateSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2019·Application pending·0 cites
- 5035US11075102B2Positioning deviceSUSS MICROTEC LITHOGRAPHY GMBH·Filed 2017·Granted Jul 27, 2021·0 cites·11 claims
Showing the top 50 of 56 patent records by PatentIndex Score.
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