Assignee
T O S CO LTD
KR·4 granted patents·2 citations·filing 2020–2021
Top patents by PatentIndex Score
4 records- 0187US11434584B2Apparatus for growing single crystal metal-oxide EPI waferT O S CO LTD·Filed 2020·Granted Sep 6, 2022·2 cites·11 claims
- 0249US11961720B2Device for detecting plasma of ultra fast with multi channelT O S CO LTD·Filed 2021·Granted Apr 16, 2024·0 cites·13 claims
- 0349US11692260B2Metal-oxide semiconductor evaporation source equipped with variable temperature control moduleT O S CO LTD·Filed 2020·Granted Jul 4, 2023·0 cites·1 claims
- 0446US12000061B2Epi-growth apparatus of separate chamber typeT O S CO LTD·Filed 2020·Granted Jun 4, 2024·0 cites·12 claims
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