Assignee
TABARELLI WERNER
9 granted patents·3,479 citations·filing 1980–1993
Top patents by PatentIndex Score
9 records- 0197US4509852AApparatus for the photolithographic manufacture of integrated circuit elementsTABARELLI WERNER·Filed 1982·Granted Apr 9, 1985·1.6k cites·4 claims
- 0297US4346164APhotolithographic method for the manufacture of integrated circuitsTABARELLI WERNER·Filed 1980·Granted Aug 24, 1982·1.8k cites·5 claims
- 0385US5146284AInterferometer gas flow systemTABARELLI WERNER·Filed 1989·Granted Sep 8, 1992·43 cites·13 claims
- 0449US5329356AInterferometer head and interferometer arrangement with rigid support structureTABARELLI WERNER·Filed 1990·Granted Jul 12, 1994·15 cites·46 claims
- 0548US5359415AInterferometer for determining the position of displacement travel of a movable measuring mirror or the likeTABARELLI WERNER·Filed 1991·Granted Oct 25, 1994·14 cites·34 claims
- 0647US5260762ADevice for non-contact measurement of speed, displacement travel and/or distanceTABARELLI WERNER·Filed 1991·Granted Nov 9, 1993·23 cites·27 claims
- 0747US5177566AInterferometer with environment sensitive static etalonTABARELLI WERNER·Filed 1990·Granted Jan 5, 1993·15 cites·26 claims
- 0844US5124994ALight generating deviceTABARELLI WERNER·Filed 1990·Granted Jun 23, 1992·11 cites·23 claims
- 0930US5645335ADevice for converting the pictures displayed on a luminous surface into electrical signalsTABARELLI WERNER·Filed 1993·Granted Jul 8, 1997·5 cites·20 claims
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