Assignee

TABCO TECHNOLOGIES INC

US·1 granted patent·16 citations·filing 1995–1995

Technology mixC23C1 H01J1 H05K1

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1 record

0148US5591313AApparatus and method for localized ion sputteringTABCO TECHNOLOGIES INC·Filed 1995·Granted Jan 7, 1997·16 cites·29 claims

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