Assignee
TAIWAN SEMICONDUCTOR MAUFACTURING COMPANY LTD
TW·3 granted patents·27 citations·filing 2007–2023
Top patents by PatentIndex Score
3 records- 0193US7871923B2Self-aligned air-gap in interconnect structuresTAIWAN SEMICONDUCTOR MAUFACTURING COMPANY LTD·Filed 2007·Granted Jan 18, 2011·27 cites·18 claims
- 0283US12164221B2Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereofTAIWAN SEMICONDUCTOR MAUFACTURING COMPANY LTD·Filed 2023·Granted Dec 10, 2024·0 cites·20 claims
- 0373US11762280B2Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereofTAIWAN SEMICONDUCTOR MAUFACTURING COMPANY LTD·Filed 2022·Granted Sep 19, 2023·0 cites·20 claims
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