Assignee
TAKIGUCHI YASUSHI
JP·4 granted patents·27 citations·filing 2007–2011
Top patents by PatentIndex Score
4 records- 0192US8337104B2Developing apparatus, developing method and storage mediumTAKIGUCHI YASUSHI·Filed 2011·Granted Dec 25, 2012·10 cites·11 claims
- 0290US8578953B2Substrate cleaning apparatus, substrate cleaning method, and computer-readable storage mediumTAKIGUCHI YASUSHI·Filed 2007·Granted Nov 12, 2013·17 cites·21 claims
- 0340US8262300B2Coating and developing apparatus, developing method and non-transitory mediumTAKIGUCHI YASUSHI·Filed 2011·Granted Sep 11, 2012·0 cites·11 claims
- 0434US8636915B2Liquid processing apparatus and liquid processing methodTAKIGUCHI YASUSHI·Filed 2011·Granted Jan 28, 2014·0 cites·10 claims
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