Assignee

TANABE MASAYUKI

JP·1 granted patent·1 pending application·6 citations·filing 2012–2012

Technology mixG03F2 B29C1 B29K1 B29L1 B82Y1

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2 records

0184US8672663B2Imprint apparatus and article manufacturing methodTANABE MASAYUKI·Filed 2012·Granted Mar 18, 2014·6 cites·9 claims
0237US2012257180A1Method of cleaning pipe of immersion exposure apparatus, and method of manufacturing deviceTANABE MASAYUKI·Filed 2012·Application pending·0 cites

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