Assignee
TANAKA HIROHISA
JP·10 granted patents·5 pending applications·25 citations·filing 2003–2012
Top patents by PatentIndex Score
15 records- 0182US8462317B2Illumination optical system, exposure apparatus, and device manufacturing methodTANAKA HIROHISA·Filed 2008·Granted Jun 11, 2013·5 cites·12 claims
- 0278US9235133B2Lighting optical device, regulation method for lighting optical device, exposure system, and exposure methodTANAKA HIROHISA·Filed 2005·Granted Jan 12, 2016·5 cites·28 claims
- 0376US8300213B2Illumination optics apparatus, exposure method, exposure apparatus, and method of manufacturing electronic deviceTANAKA HIROHISA·Filed 2008·Granted Oct 30, 2012·3 cites·23 claims
- 0470US8520291B2Illumination optical system, exposure apparatus, and device manufacturing methodTANAKA HIROHISA·Filed 2008·Granted Aug 27, 2013·3 cites·59 claims
- 0570US8508717B2Illumination optical system, exposure apparatus, and device manufacturing methodTANAKA HIROHISA·Filed 2012·Granted Aug 13, 2013·1 cites·21 claims
- 0670US8177570B2Cable connectorTANAKA HIROHISA·Filed 2010·Granted May 15, 2012·6 cites·8 claims
- 0767US9195069B2Illumination optical apparatus, exposure apparatus, and device manufacturing methodTANAKA HIROHISA·Filed 2007·Granted Nov 24, 2015·2 cites·45 claims
- 0853US2009131252A1Catalyst CompositionTANAKA HIROHISA·Filed 2006·Application pending·0 cites
- 0946US8493549B2Illumination optical apparatus, exposure apparatus, and device manufacturing methodTANAKA HIROHISA·Filed 2008·Granted Jul 23, 2013·0 cites·8 claims
- 1046US2009253286A1Connector for small recording mediumTANAKA HIROHISA·Filed 2006·Application pending·0 cites
- 1145US8451430B2Illumination optical system, exposure apparatus, and device manufacturing methodTANAKA HIROHISA·Filed 2011·Granted May 28, 2013·0 cites·37 claims
- 1244US8947635B2Illumination optical system, exposure apparatus, and device manufacturing methodTANAKA HIROHISA·Filed 2011·Granted Feb 3, 2015·0 cites·33 claims
- 1344US2009115989A1Lighting optical system, exposure system, and exposure methodTANAKA HIROHISA·Filed 2006·Application pending·0 cites
- 1441US2005233897A1Catalyst for exhaust gas purificationTANAKA HIROHISA·Filed 2003·Application pending·0 cites
- 1539US2005245391A1Catalyst for exhaust gas purificationTANAKA HIROHISA·Filed 2003·Application pending·0 cites
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