Assignee
TANGO NAOHIRO
JP·1 granted patent·1 pending application·0 citations·filing 2010–2011
Top patents by PatentIndex Score
2 records- 0132US2012164573A1Actinic-ray-sensitive or radiation-sensitive resin composition, and resist film and pattern forming method using the sameTANGO NAOHIRO·Filed 2011·Application pending·0 cites
- 0230US8846290B2Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the sameTANGO NAOHIRO·Filed 2010·Granted Sep 30, 2014·0 cites·29 claims
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