Assignee
TANIGUCHI ATSUSHI
JP·5 granted patents·16 citations·filing 2010–2012
Top patents by PatentIndex Score
5 records- 0187US8830465B2Defect inspecting apparatus and defect inspecting methodTANIGUCHI ATSUSHI·Filed 2011·Granted Sep 9, 2014·7 cites·14 claims
- 0281US8681328B2Dark-field defect inspecting method, dark-field defect inspecting apparatus, aberration analyzing method, and aberration analyzing apparatusTANIGUCHI ATSUSHI·Filed 2010·Granted Mar 25, 2014·4 cites·18 claims
- 0376US8970836B2Defect inspecting apparatus and defect inspecting methodTANIGUCHI ATSUSHI·Filed 2012·Granted Mar 3, 2015·2 cites·19 claims
- 0473US9019492B2Defect inspection device and defect inspection methodTANIGUCHI ATSUSHI·Filed 2011·Granted Apr 28, 2015·2 cites·11 claims
- 0568US8885037B2Defect inspection method and apparatus thereforTANIGUCHI ATSUSHI·Filed 2010·Granted Nov 11, 2014·1 cites·10 claims
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