Assignee
TANIYAMA TOMOSHI
JP·1 granted patent·2 pending applications·5 citations·filing 2006–2012
Top patents by PatentIndex Score
3 records- 0170US8172946B2Semiconductor device manufacturing apparatus and manufacturing method of semiconductor deviceTANIYAMA TOMOSHI·Filed 2006·Granted May 8, 2012·5 cites·10 claims
- 0233US2012052657A1Method of forming film and substrate processing apparatusTANIYAMA TOMOSHI·Filed 2011·Application pending·0 cites
- 0326US2012240858A1Substrate processing apparatus and solid raw material replenishing methodTANIYAMA TOMOSHI·Filed 2012·Application pending·0 cites
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