Assignee
TAPPAN JAMES E
US·4 granted patents·77 citations·filing 2008–2012
Top patents by PatentIndex Score
4 records- 0195US8552334B2Adjustable gap capacitively coupled RF plasma reactor including lateral bellows and non-contact particle sealTAPPAN JAMES E·Filed 2009·Granted Oct 8, 2013·68 cites·17 claims
- 0283US8257548B2Electrode orientation and parallelism adjustment mechanism for plasma processing systemsTAPPAN JAMES E·Filed 2008·Granted Sep 4, 2012·6 cites·19 claims
- 0372US8394233B2Electrode orientation and parallelism adjustment mechanism for plasma processing systemsTAPPAN JAMES E·Filed 2012·Granted Mar 12, 2013·2 cites·10 claims
- 0454US8438712B2Floating collar clamping device for auto-aligning nut and screw in linear motion leadscrew and nut assemblyTAPPAN JAMES E·Filed 2009·Granted May 14, 2013·1 cites·8 claims
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