Assignee
TEC SEM AG
CH·4 granted patents·2 pending applications·59 citations·filing 1997–2017
Top patents by PatentIndex Score
6 records- 0167US6540468B1Device and method for handling individual wafersTEC SEM AG·Filed 1999·Granted Apr 1, 2003·44 cites·12 claims
- 0252US7682455B2Device for storing and/or transporting plate-shaped substrates in the manufacture of electronic componentsTEC SEM AG·Filed 2004·Granted Mar 23, 2010·5 cites·22 claims
- 0346US7287951B2Device and method for the harmonized positioning of wafer disksTEC SEM AG·Filed 2002·Granted Oct 30, 2007·2 cites·14 claims
- 0443US2018169720A1Substrate compartment cleaningTEC SEM AG·Filed 2017·Application pending·0 cites
- 0538US5975825ATransfer apparatus for wafersTEC SEM AG·Filed 1997·Granted Nov 2, 1999·8 cites·14 claims
- 0634US2018122675A1Substrate carrier transport, sorting and loading/unloadingTEC SEM AG·Filed 2017·Application pending·0 cites
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