Assignee
TEL KYUSHU KK
JP·3 granted patents·151 citations·filing 1991–1993
Top patents by PatentIndex Score
3 records- 0190US5445699AProcessing apparatus with a gas distributor having back and forth parallel movement relative to a workpiece support surfaceTEL KYUSHU KK·Filed 1993·Granted Aug 29, 1995·92 cites·14 claims
- 0267US5249142AIndirect temperature-measurement of films formed on semiconductor wafersTEL KYUSHU KK·Filed 1992·Granted Sep 28, 1993·34 cites·12 claims
- 0354US5225663AHeat process deviceTEL KYUSHU KK·Filed 1991·Granted Jul 6, 1993·25 cites·5 claims
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