Assignee
TEL SAGAMI LTD
JP·86 granted patents·5,834 citations·filing 1988–1994
Top patents by PatentIndex Score
86 records- 0198US5228114AHeat-treating apparatus with batch scheme having improved heat controlling capabilityTEL SAGAMI LTD·Filed 1991·Granted Jul 13, 1993·503 cites·23 claims
- 0297US5097890AHeat treating apparatus with cooling fluid nozzlesTEL SAGAMI LTD·Filed 1990·Granted Mar 24, 1992·421 cites·5 claims
- 0397US5069591ASemiconductor wafer-processing apparatusTEL SAGAMI LTD·Filed 1989·Granted Dec 3, 1991·425 cites·6 claims
- 0496US5261167AVertical heat treating apparatusTEL SAGAMI LTD·Filed 1991·Granted Nov 16, 1993·362 cites·7 claims
- 0596US5178639AVertical heat-treating apparatusTEL SAGAMI LTD·Filed 1991·Granted Jan 12, 1993·476 cites·13 claims
- 0695US5249960AForced cooling apparatus for heat treatment apparatusTEL SAGAMI LTD·Filed 1992·Granted Oct 5, 1993·381 cites·10 claims
- 0790US5536918AHeat treatment apparatus utilizing flat heating elements for treating semiconductor wafersTEL SAGAMI LTD·Filed 1994·Granted Jul 16, 1996·141 cites·2 claims
- 0890US4970435APlasma processing apparatusTEL SAGAMI LTD·Filed 1988·Granted Nov 13, 1990·59 cites·8 claims
- 0988US4950870AHeat-treating apparatusTEL SAGAMI LTD·Filed 1988·Granted Aug 21, 1990·71 cites·6 claims
- 1088US4938691AHeat-treating apparatusTEL SAGAMI LTD·Filed 1988·Granted Jul 3, 1990·38 cites·17 claims
- 1187US5445486ASubstrate transferring apparatusTEL SAGAMI LTD·Filed 1994·Granted Aug 29, 1995·110 cites·9 claims
- 1287US5261935AClean air apparatusTEL SAGAMI LTD·Filed 1993·Granted Nov 16, 1993·112 cites·11 claims
- 1387US5162047AVertical heat treatment apparatus having wafer transfer mechanism and method for transferring wafersTEL SAGAMI LTD·Filed 1991·Granted Nov 10, 1992·107 cites·8 claims
- 1487US5125784AWafers transfer deviceTEL SAGAMI LTD·Filed 1991·Granted Jun 30, 1992·116 cites·6 claims
- 1586US5055036AMethod of loading and unloading wafer boatTEL SAGAMI LTD·Filed 1991·Granted Oct 8, 1991·111 cites·7 claims
- 1686US5007788APitch changing device for changing pitches of plate-like objects and method of changing pitchesTEL SAGAMI LTD·Filed 1989·Granted Apr 16, 1991·74 cites·6 claims
- 1786US4947784AApparatus and method for transferring wafers between a cassette and a boatTEL SAGAMI LTD·Filed 1988·Granted Aug 14, 1990·76 cites·18 claims
- 1885US5128515AHeating apparatusTEL SAGAMI LTD·Filed 1991·Granted Jul 7, 1992·57 cites·14 claims
- 1985US5011705APlasma processing methodTEL SAGAMI LTD·Filed 1989·Granted Apr 30, 1991·33 cites·11 claims
- 2083US5221201AVertical heat treatment apparatusTEL SAGAMI LTD·Filed 1991·Granted Jun 22, 1993·52 cites·17 claims
- 2183US5183378AWafer counter having device for aligning wafersTEL SAGAMI LTD·Filed 1991·Granted Feb 2, 1993·85 cites·9 claims
- 2283US5054988AApparatus for transferring semiconductor wafersTEL SAGAMI LTD·Filed 1989·Granted Oct 8, 1991·65 cites·9 claims
- 2381US5110248AVertical heat-treatment apparatus having a wafer transfer mechanismTEL SAGAMI LTD·Filed 1990·Granted May 5, 1992·90 cites·12 claims
- 2481US4989540AApparatus for reaction treatmentTEL SAGAMI LTD·Filed 1989·Granted Feb 5, 1991·59 cites·11 claims
- 2580US5368648ASealing apparatusTEL SAGAMI LTD·Filed 1994·Granted Nov 29, 1994·105 cites·22 claims
- 2680US5048164AVertical heat-treatment apparatus having boat transfer mechanismTEL SAGAMI LTD·Filed 1990·Granted Sep 17, 1991·87 cites·17 claims
- 2778US5277579AWafers transferring method in vertical type heat treatment apparatus and the vertical type heat treatment apparatus provided with a wafers transferring systemTEL SAGAMI LTD·Filed 1992·Granted Jan 11, 1994·71 cites·7 claims
- 2877US5207573AHeat processing apparatusTEL SAGAMI LTD·Filed 1992·Granted May 4, 1993·83 cites·15 claims
- 2977US5181819AApparatus for processing semiconductorsTEL SAGAMI LTD·Filed 1991·Granted Jan 26, 1993·63 cites·10 claims
- 3077US5088922AHeat-treatment apparatus having exhaust systemTEL SAGAMI LTD·Filed 1991·Granted Feb 18, 1992·25 cites·12 claims
- 3176US5429498AHeat treatment method and apparatus thereofTEL SAGAMI LTD·Filed 1992·Granted Jul 4, 1995·51 cites·4 claims
- 3276US4943235AHeat-treating apparatusTEL SAGAMI LTD·Filed 1988·Granted Jul 24, 1990·23 cites·10 claims
- 3375US5271732AHeat-treating apparatusTEL SAGAMI LTD·Filed 1992·Granted Dec 21, 1993·24 cites·4 claims
- 3474US5030057ASemiconductor wafer transferring method and apparatus and boat for thermal treatment of a semiconductor waferTEL SAGAMI LTD·Filed 1988·Granted Jul 9, 1991·41 cites·7 claims
- 3571US5360336AForced cooling apparatus for heat treatment apparatusTEL SAGAMI LTD·Filed 1993·Granted Nov 1, 1994·25 cites·5 claims
- 3671US5273423AHeat treatment apparatusTEL SAGAMI LTD·Filed 1992·Granted Dec 28, 1993·51 cites·13 claims
- 3771US5203445ACarrier conveying apparatusTEL SAGAMI LTD·Filed 1991·Granted Apr 20, 1993·52 cites·27 claims
- 3871US5016567AApparatus for treatment using gasTEL SAGAMI LTD·Filed 1989·Granted May 21, 1991·29 cites·7 claims
- 3970US5279670AVertical type diffusion apparatusTEL SAGAMI LTD·Filed 1991·Granted Jan 18, 1994·59 cites·20 claims
- 4070US4955775ASemiconductor wafer treating apparatusTEL SAGAMI LTD·Filed 1988·Granted Sep 11, 1990·30 cites·5 claims
- 4169US5393349ASemiconductor wafer processing apparatusTEL SAGAMI LTD·Filed 1993·Granted Feb 28, 1995·43 cites·7 claims
- 4268US5187771AHeat processing apparatus utilizing a plurality of stacked heater holdersTEL SAGAMI LTD·Filed 1991·Granted Feb 16, 1993·54 cites·15 claims
- 4367US5651670AHeat treatment method and apparatus thereofTEL SAGAMI LTD·Filed 1994·Granted Jul 29, 1997·34 cites·8 claims
- 4467US5324920AHeat treatment apparatusTEL SAGAMI LTD·Filed 1991·Granted Jun 28, 1994·42 cites·14 claims
- 4565US5123804AHorizontal/vertical conversion handling apparatusTEL SAGAMI LTD·Filed 1990·Granted Jun 23, 1992·38 cites·9 claims
- 4665US4937434AHeat treatment apparatus and heat treatment methodTEL SAGAMI LTD·Filed 1989·Granted Jun 26, 1990·30 cites·9 claims
- 4764US5131799ASemiconductor wafer transferring apparatus and boat for thermal treatment of a semiconductor waferTEL SAGAMI LTD·Filed 1990·Granted Jul 21, 1992·32 cites·7 claims
- 4863US5273424AVertical heat treatment apparatusTEL SAGAMI LTD·Filed 1992·Granted Dec 28, 1993·16 cites·20 claims
- 4963US5236181AVertical heat treating apparatusTEL SAGAMI LTD·Filed 1991·Granted Aug 17, 1993·15 cites·23 claims
- 5063US4952115AWafer support deviceTEL SAGAMI LTD·Filed 1989·Granted Aug 28, 1990·27 cites·7 claims
Showing the top 50 of 86 patent records by PatentIndex Score.
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