Assignee
TENCOR INSTRUMENTS
US·49 granted patents·5,289 citations·filing 1977–1995
Top patents by PatentIndex Score
49 records- 0198US5633747AVariable spot-size scanning apparatusTENCOR INSTRUMENTS·Filed 1994·Granted May 27, 1997·181 cites·36 claims
- 0297US5416594ASurface scanner with thin film gaugeTENCOR INSTRUMENTS·Filed 1993·Granted May 16, 1995·210 cites·24 claims
- 0397US5264912ASpeckle reduction track filter apparatus for optical inspection of patterned substratesTENCOR INSTRUMENTS·Filed 1992·Granted Nov 23, 1993·223 cites·39 claims
- 0497US5189481AParticle detector for rough surfacesTENCOR INSTRUMENTS·Filed 1991·Granted Feb 23, 1993·276 cites·14 claims
- 0597US4898471AParticle detection on patterned wafers and the likeTENCOR INSTRUMENTS·Filed 1988·Granted Feb 6, 1990·295 cites·21 claims
- 0696US4844617AConfocal measuring microscope with automatic focusingTENCOR INSTRUMENTS·Filed 1988·Granted Jul 4, 1989·530 cites·30 claims
- 0796US4378159AScanning contaminant and defect detectorTENCOR INSTRUMENTS·Filed 1981·Granted Mar 29, 1983·229 cites·12 claims
- 0895US5608526AFocused beam spectroscopic ellipsometry method and systemTENCOR INSTRUMENTS·Filed 1995·Granted Mar 4, 1997·745 cites·72 claims
- 0995US5355212AProcess for inspecting patterned wafersTENCOR INSTRUMENTS·Filed 1993·Granted Oct 11, 1994·163 cites·29 claims
- 1095US5076692AParticle detection on a patterned or bare wafer surfaceTENCOR INSTRUMENTS·Filed 1990·Granted Dec 31, 1991·157 cites·24 claims
- 1195US4601576ALight collector for optical contaminant and flaw detectorTENCOR INSTRUMENTS·Filed 1983·Granted Jul 22, 1986·134 cites·13 claims
- 1293US4899055AThin film thickness measuring methodTENCOR INSTRUMENTS·Filed 1988·Granted Feb 6, 1990·176 cites·7 claims
- 1393US4766324AParticle detection method including comparison between sequential scansTENCOR INSTRUMENTS·Filed 1987·Granted Aug 23, 1988·138 cites·19 claims
- 1493US4641967AParticle position correlator and correlation method for a surface scannerTENCOR INSTRUMENTS·Filed 1985·Granted Feb 10, 1987·115 cites·13 claims
- 1592US5581350AMethod and system for calibrating an ellipsometerTENCOR INSTRUMENTS·Filed 1995·Granted Dec 3, 1996·162 cites·20 claims
- 1692US4597665ADual collector optical flaw detectorTENCOR INSTRUMENTS·Filed 1984·Granted Jul 1, 1986·70 cites·16 claims
- 1791US5705741AConstant-force profilometer with stylus-stabilizing sensor assembly, dual-view optics, and temperature drift compensationTENCOR INSTRUMENTS·Filed 1994·Granted Jan 6, 1998·71 cites·58 claims
- 1891US4302721ANon-contacting resistivity instrument with structurally related conductance and distance measuring transducersTENCOR INSTRUMENTS·Filed 1979·Granted Nov 24, 1981·56 cites·29 claims
- 1990US5241366AThin film thickness monitorTENCOR INSTRUMENTS·Filed 1992·Granted Aug 31, 1993·79 cites·38 claims
- 2089US5604585AParticle detection system employing a subsystem for collecting scattered light from the particlesTENCOR INSTRUMENTS·Filed 1995·Granted Feb 18, 1997·106 cites·34 claims
- 2187US5023424AShock wave particle removal method and apparatusTENCOR INSTRUMENTS·Filed 1990·Granted Jun 11, 1991·113 cites·12 claims
- 2286US5530550AOptical wafer positioning systemTENCOR INSTRUMENTS·Filed 1994·Granted Jun 25, 1996·79 cites·39 claims
- 2384US5168386AFlat field telecentric scannerTENCOR INSTRUMENTS·Filed 1990·Granted Dec 1, 1992·74 cites·13 claims
- 2484US4752898AEdge finding in wafersTENCOR INSTRUMENTS·Filed 1987·Granted Jun 21, 1988·68 cites·15 claims
- 2583US5276498AAdaptive spatial filter for surface inspectionTENCOR INSTRUMENTS·Filed 1992·Granted Jan 4, 1994·70 cites·13 claims
- 2683US4967095AMethod and apparatus for detecting and sizing particles on surfacesTENCOR INSTRUMENTS·Filed 1989·Granted Oct 30, 1990·48 cites·30 claims
- 2782US5565979ASurface scanning apparatus and method using crossed-cylinder optical elementsTENCOR INSTRUMENTS·Filed 1994·Granted Oct 15, 1996·56 cites·12 claims
- 2882US4103542AMetrology instrument for measuring vertical profiles of integrated circuitsTENCOR INSTRUMENTS·Filed 1977·Granted Aug 1, 1978·29 cites·24 claims
- 2981US4988877AVia hole checkerTENCOR INSTRUMENTS·Filed 1989·Granted Jan 29, 1991·55 cites·21 claims
- 3081US4609037AApparatus for heating and cooling articlesTENCOR INSTRUMENTS·Filed 1985·Granted Sep 2, 1986·65 cites·8 claims
- 3180US5309755AProfilometer stylus assembly insensitive to vibrationTENCOR INSTRUMENTS·Filed 1992·Granted May 10, 1994·39 cites·13 claims
- 3278US4877997AHigh brightness and viewed gas discharge lampTENCOR INSTRUMENTS·Filed 1988·Granted Oct 31, 1989·21 cites·22 claims
- 3377US5576831AWafer alignment sensorTENCOR INSTRUMENTS·Filed 1994·Granted Nov 19, 1996·79 cites·35 claims
- 3477US5243465AArea-division beamsplitter with broad spectral bandwidthTENCOR INSTRUMENTS·Filed 1992·Granted Sep 7, 1993·42 cites·24 claims
- 3575US4391044AMetrology instrument for measuring vertical profiles of integrated circuits and the likeTENCOR INSTRUMENTS·Filed 1981·Granted Jul 5, 1983·23 cites·7 claims
- 3674US5552704AEddy current test method and apparatus for measuring conductance by determining intersection of lift-off and selected curvesTENCOR INSTRUMENTS·Filed 1993·Granted Sep 3, 1996·56 cites·30 claims
- 3774US4965484AVapor discharge lamp with gradient temperature controlTENCOR INSTRUMENTS·Filed 1989·Granted Oct 23, 1990·18 cites·24 claims
- 3873US4597708AWafer handling apparatusTENCOR INSTRUMENTS·Filed 1984·Granted Jul 1, 1986·36 cites·15 claims
- 3970US4512659AApparatus for calibrating a surface scannerTENCOR INSTRUMENTS·Filed 1983·Granted Apr 23, 1985·25 cites·6 claims
- 4068US4861125ASuspension assembly for a scanning mirrorTENCOR INSTRUMENTS·Filed 1988·Granted Aug 29, 1989·26 cites·16 claims
- 4167US4998019APhotoemission contaminant detectorTENCOR INSTRUMENTS·Filed 1989·Granted Mar 5, 1991·21 cites·36 claims
- 4267US4175441AGauge for measuring distance to planar surfaces and thicknesses of planar membersTENCOR INSTRUMENTS·Filed 1978·Granted Nov 27, 1979·18 cites·23 claims
- 4362US5083035APosition location in surface scanning using interval timing between scan marks on test wafersTENCOR INSTRUMENTS·Filed 1990·Granted Jan 21, 1992·25 cites·10 claims
- 4462US4280354AAcoustic method and apparatus for measuring surfaces of wafers and similar articlesTENCOR INSTRUMENTS·Filed 1980·Granted Jul 28, 1981·18 cites·16 claims
- 4560US4376482AWafer orientation systemTENCOR INSTRUMENTS·Filed 1981·Granted Mar 15, 1983·22 cites·9 claims
- 4659US4285053AAcoustic method and apparatus for measuring micron and submicron distancesTENCOR INSTRUMENTS·Filed 1979·Granted Aug 18, 1981·13 cites·8 claims
- 4750US4433835AWafer chuck with wafer cleaning featureTENCOR INSTRUMENTS·Filed 1981·Granted Feb 28, 1984·15 cites·3 claims
- 4844US5026437ACantilevered microtip manufacturing by ion implantation and etchingTENCOR INSTRUMENTS·Filed 1990·Granted Jun 25, 1991·14 cites·39 claims
- 4943US4282483AProbe for determining p or n-type conductivity of semiconductor materialTENCOR INSTRUMENTS·Filed 1979·Granted Aug 4, 1981·5 cites·26 claims
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