Assignee
TERATECH CO LTD
KR·1 granted patent·1 pending application·0 citations·filing 2006–2014
Top patents by PatentIndex Score
2 records- 0146US9162179B2Apparatus for decomposing perfluorocarbon and harmful gas using high-density confined plasma sourceTERATECH CO LTD·Filed 2014·Granted Oct 20, 2015·0 cites·19 claims
- 0217US2007286766A1Apparatus for cleaning exhaust part and vacuum pump of reaction chamber for semiconductor device and LCD manufacturing equipmentTERATECH CO LTD·Filed 2006·Application pending·0 cites
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