Assignee
TEZUKA SACHIAKI
JP·2 granted patents·7 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0177US8410486B2Method for manufacturing microcrystalline semiconductor film and method for manufacturing semiconductor deviceTEZUKA SACHIAKI·Filed 2011·Granted Apr 2, 2013·4 cites·25 claims
- 0271US8884297B2Microcrystalline silicon film, manufacturing method thereof, semiconductor device, and manufacturing method thereofTEZUKA SACHIAKI·Filed 2011·Granted Nov 11, 2014·3 cites·10 claims
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