Assignee
THERMA WAVE INC
US·190 granted patents·11,476 citations·filing 1982–2006
Top patents by PatentIndex Score
190 records- 0199US6972852B2Critical dimension analysis with simultaneous multiple angle of incidence measurementsTHERMA WAVE INC·Filed 2004·Granted Dec 6, 2005·183 cites·24 claims
- 0299US6819426B2Overlay alignment metrology using diffraction gratingsTHERMA WAVE INC·Filed 2002·Granted Nov 16, 2004·373 cites·31 claims
- 0399US6813034B2Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurementsTHERMA WAVE INC·Filed 2002·Granted Nov 2, 2004·233 cites·15 claims
- 0499US6704661B1Real time analysis of periodic structures on semiconductorsTHERMA WAVE INC·Filed 2001·Granted Mar 9, 2004·215 cites·28 claims
- 0599US6429943B1Critical dimension analysis with simultaneous multiple angle of incidence measurementsTHERMA WAVE INC·Filed 2001·Granted Aug 6, 2002·463 cites·84 claims
- 0699US6297880B1Apparatus for analyzing multi-layer thin film stacks on semiconductorsTHERMA WAVE INC·Filed 2000·Granted Oct 2, 2001·172 cites·13 claims
- 0799US6278519B1Apparatus for analyzing multi-layer thin film stacks on semiconductorsTHERMA WAVE INC·Filed 1998·Granted Aug 21, 2001·210 cites·49 claims
- 0899US5181080AMethod and apparatus for evaluating the thickness of thin filmsTHERMA WAVE INC·Filed 1991·Granted Jan 19, 1993·291 cites·34 claims
- 0998US7061627B2Optical scatterometry of asymmetric lines and structuresTHERMA WAVE INC·Filed 2003·Granted Jun 13, 2006·153 cites·8 claims
- 1098US7046376B2Overlay targets with isolated, critical-dimension features and apparatus to measure overlayTHERMA WAVE INC·Filed 2003·Granted May 16, 2006·159 cites·13 claims
- 1198US6919964B2CD metrology analysis using a finite difference methodTHERMA WAVE INC·Filed 2003·Granted Jul 19, 2005·162 cites·32 claims
- 1298US6753961B1Spectroscopic ellipsometer without rotating componentsTHERMA WAVE INC·Filed 2001·Granted Jun 22, 2004·154 cites·29 claims
- 1398US6678046B2Detector configurations for optical metrologyTHERMA WAVE INC·Filed 2002·Granted Jan 13, 2004·102 cites·19 claims
- 1498US5900939AThin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 1998·Granted May 4, 1999·174 cites·13 claims
- 1598US5877859ABroadband spectroscopic rotating compensator ellipsometerTHERMA WAVE INC·Filed 1996·Granted Mar 2, 1999·202 cites·66 claims
- 1698US5798837AThin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 1997·Granted Aug 25, 1998·233 cites·27 claims
- 1798US5412473AMultiple angle spectroscopic analyzer utilizing interferometric and ellipsometric devicesTHERMA WAVE INC·Filed 1993·Granted May 2, 1995·241 cites·34 claims
- 1898US5159412AOptical measurement device with enhanced sensitivityTHERMA WAVE INC·Filed 1991·Granted Oct 27, 1992·190 cites·13 claims
- 1998US5042951AHigh resolution ellipsometric apparatusTHERMA WAVE INC·Filed 1989·Granted Aug 27, 1991·483 cites·24 claims
- 2098US4999014AMethod and apparatus for measuring thickness of thin filmsTHERMA WAVE INC·Filed 1989·Granted Mar 12, 1991·539 cites·44 claims
- 2198US4854710AMethod and apparatus for evaluating surface and subsurface features in a semiconductorTHERMA WAVE INC·Filed 1987·Granted Aug 8, 1989·188 cites·34 claims
- 2298US4636088AMethod and apparatus for evaluating surface conditions of a sampleTHERMA WAVE INC·Filed 1984·Granted Jan 13, 1987·165 cites·27 claims
- 2398US4522510AThin film thickness measurement with thermal wavesTHERMA WAVE INC·Filed 1983·Granted Jun 11, 1985·199 cites·20 claims
- 2497US7038850B2CD metrology analysis using green's functionTHERMA WAVE INC·Filed 2005·Granted May 2, 2006·67 cites·49 claims
- 2597US6778911B2Real time analysis of periodic structures on semiconductorsTHERMA WAVE INC·Filed 2003·Granted Aug 17, 2004·82 cites·19 claims
- 2697US6768967B2Database interpolation method for optical measurement of diffractive microstructuresTHERMA WAVE INC·Filed 2001·Granted Jul 27, 2004·110 cites·47 claims
- 2797US6738138B2Small spot ellipsometerTHERMA WAVE INC·Filed 2002·Granted May 18, 2004·122 cites·23 claims
- 2897US5978074AApparatus for evaluating metalized layers on semiconductorsTHERMA WAVE INC·Filed 1997·Granted Nov 2, 1999·201 cites·56 claims
- 2997US5074669AMethod and apparatus for evaluating ion implant dosage levels in semiconductorsTHERMA WAVE INC·Filed 1989·Granted Dec 24, 1991·177 cites·10 claims
- 3097US4750822AMethod and apparatus for optically detecting surface states in materialsTHERMA WAVE INC·Filed 1986·Granted Jun 14, 1988·179 cites·28 claims
- 3197US4513384AThin film thickness measurements and depth profiling utilizing a thermal wave detection systemTHERMA WAVE INC·Filed 1982·Granted Apr 23, 1985·129 cites·12 claims
- 3296US6842259B2Analysis of isolated and aperiodic structures with simultaneous multiple angle of incidence measurementsTHERMA WAVE INC·Filed 2004·Granted Jan 11, 2005·71 cites·14 claims
- 3396US6836328B2Detector configurations for optical metrologyTHERMA WAVE INC·Filed 2003·Granted Dec 28, 2004·52 cites·9 claims
- 3496US6643354B2Calibration and alignment of X-ray reflectometric systemsTHERMA WAVE INC·Filed 2002·Granted Nov 4, 2003·78 cites·26 claims
- 3596US6453006B1Calibration and alignment of X-ray reflectometric systemsTHERMA WAVE INC·Filed 2000·Granted Sep 17, 2002·93 cites·19 claims
- 3696US5596406ASample characteristic analysis utilizing multi wavelength and multi angle polarization and magnitude change detectionTHERMA WAVE INC·Filed 1995·Granted Jan 21, 1997·203 cites·9 claims
- 3796US5596411AIntegrated spectroscopic ellipsometerTHERMA WAVE INC·Filed 1996·Granted Jan 21, 1997·205 cites·22 claims
- 3896US4679946AEvaluating both thickness and compositional variables in a thin film sampleTHERMA WAVE INC·Filed 1984·Granted Jul 14, 1987·115 cites·17 claims
- 3995US6995842B2Detector configurations for optical metrologyTHERMA WAVE INC·Filed 2004·Granted Feb 7, 2006·51 cites·10 claims
- 4095US6947135B2Reduced multicubic database interpolation method for optical measurement of diffractive microstructuresTHERMA WAVE INC·Filed 2003·Granted Sep 20, 2005·63 cites·13 claims
- 4195US6654131B2Critical dimension analysis with simultaneous multiple angle of incidence measurementsTHERMA WAVE INC·Filed 2002·Granted Nov 25, 2003·50 cites·19 claims
- 4295US6411385B2Thin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 2001·Granted Jun 25, 2002·54 cites·12 claims
- 4395US6320657B1Broadband spectroscopic rotating compensator ellipsometerTHERMA WAVE INC·Filed 2000·Granted Nov 20, 2001·56 cites·9 claims
- 4495US4521118AMethod for detection of thermal waves with a laser probeTHERMA WAVE INC·Filed 1982·Granted Jun 4, 1985·94 cites·15 claims
- 4594US7031848B2Real time analysis of periodic structures on semiconductorsTHERMA WAVE INC·Filed 2005·Granted Apr 18, 2006·18 cites·18 claims
- 4694US6898596B2Evolution of library data setsTHERMA WAVE INC·Filed 2002·Granted May 24, 2005·74 cites·18 claims
- 4794US6778273B2Polarimetric scatterometer for critical dimension measurements of periodic structuresTHERMA WAVE INC·Filed 2002·Granted Aug 17, 2004·51 cites·12 claims
- 4894US6623991B2Method of measuring meso-scale structures on wafersTHERMA WAVE INC·Filed 2001·Granted Sep 23, 2003·57 cites·12 claims
- 4994US6515746B2Thin film optical measurement system and method with calibrating ellipsometerTHERMA WAVE INC·Filed 2002·Granted Feb 4, 2003·42 cites·22 claims
- 5094US6417921B2Apparatus for analyzing multi-layer thin film stacks on semiconductorsTHERMA WAVE INC·Filed 2001·Granted Jul 9, 2002·49 cites·14 claims
Showing the top 50 of 190 patent records by PatentIndex Score.
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