Assignee
THERMCO SYSTEMS INC
US·12 granted patents·255 citations·filing 1983–1987
Top patents by PatentIndex Score
12 records- 0177US4711989ADiffusion furnace multizone temperature controlTHERMCO SYSTEMS INC·Filed 1986·Granted Dec 8, 1987·28 cites·6 claims
- 0273US4722659ASemiconductor wafer carrier transport apparatusTHERMCO SYSTEMS INC·Filed 1986·Granted Feb 2, 1988·45 cites·6 claims
- 0370US4557950AProcess for deposition of borophosphosilicate glassTHERMCO SYSTEMS INC·Filed 1984·Granted Dec 10, 1985·38 cites·14 claims
- 0469US4619840AProcess and apparatus for low pressure chemical vapor deposition of refractory metalTHERMCO SYSTEMS INC·Filed 1983·Granted Oct 28, 1986·32 cites·13 claims
- 0567US4934767ASemiconductor wafer carrier input/output drawerTHERMCO SYSTEMS INC·Filed 1986·Granted Jun 19, 1990·35 cites·5 claims
- 0649US4728246AWafer boat transfer toolTHERMCO SYSTEMS INC·Filed 1986·Granted Mar 1, 1988·17 cites·10 claims
- 0748US4721427AWafer transfer standTHERMCO SYSTEMS INC·Filed 1987·Granted Jan 26, 1988·16 cites·3 claims
- 0847US4692115ASemiconductor wafer furnace doorTHERMCO SYSTEMS INC·Filed 1986·Granted Sep 8, 1987·18 cites·8 claims
- 0940US4726961AProcess for low pressure chemical vapor deposition of refractory metalTHERMCO SYSTEMS INC·Filed 1986·Granted Feb 23, 1988·11 cites·3 claims
- 1037US4711197AGas scavengerTHERMCO SYSTEMS INC·Filed 1986·Granted Dec 8, 1987·7 cites·8 claims
- 1129US4636140AMethod of loading and unloading a furnaceTHERMCO SYSTEMS INC·Filed 1985·Granted Jan 13, 1987·5 cites·8 claims
- 1227US4684863ASemiconductor wafer boat loader control systemTHERMCO SYSTEMS INC·Filed 1986·Granted Aug 4, 1987·3 cites·10 claims
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