Assignee

THREE TEC CO LTD

JP·1 granted patent·14 citations·filing 2001–2001

Technology mixB01D1 B01J1 H05H1 Y02C1

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0166US7378062B2Object processing apparatus and plasma facility comprising the sameTHREE TEC CO LTD·Filed 2001·Granted May 27, 2008·14 cites·21 claims

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